Canister

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COMPANY INFO

Canister

Canister

Canister

A core vessel designed to safely store and deliver high-purity gases and precursors for semiconductor processes, ensuring stable operation through durability and cleanliness.

Role and Function of Canisters in Semiconductor Processes

Canisters are critical vessels used to safely store and transfer high-purity precursors and specialty gases in semiconductor manufacturing. They are designed with precision surface treatment and corrosion-resistant materials to maintain gas purity and ensure stable supply.

  1. High-Purity Storage Maintains maximum cleanliness for precursors and specialty gases.
  2. Stable Supply Delivers gas at consistent pressure and flow during process operation.
  3. Durability and Safety Secures strong corrosion resistance and mechanical stability.
  4. Next-Generation Process Readiness Provides an optimized design for advanced ALD and CVD processes.
Cleaning Equipment
List
Image
  • 1 Wet Station
  • 2 UPW System
1Wet Station Wet Station
2UPW System UPW System
Inspection Equipment
List
Image
  • 1 Forced Convection Oven (4ea)
  • 2 He Leak Detector (2ea)
  • 3 Cycle Purge System (1ea)
  • 4 Moisture Analyzer (2ea)
  • 5 Air Particle Counter (1ea)
1Forced Convection Oven (4ea) Forced Convection Oven (4ea)
2He Leak Detector (2ea) He Leak Detector (2ea)
3Cycle Purge System (1ea) Cycle Purge System (1ea)
4Moisture Analyzer (2ea) Moisture Analyzer (2ea)
5Air Particle Counter (1ea) Air Particle Counter (1ea)