PRODUCT INFO
Explore key information about the chemical elements through this periodic table
Low-k
반도체 DRAM과 3D-NAND
제조 공정에서 사용되며,
CVD/ALD 공정을 통한 SiO2
박막 증착의 용도로 사용됩니다.
High-k
Tetraethyl orthosilicate
Bis(cyclopentadienyl)hafnium dichloride
Tetrakis(dimethylamido)hafnium
Tetrakis(ethylmethylamido)hafnium
Bis(cyclopentadienyl)zirconium dichloride
Tetrakis(dimethylamido)zirconium
Tetrakis(ethylmethylamido)zirconium
Tris(tert-butylimido)tris(diethylamido)niobium
Pentamethylcyclopentadienyl trimethoxytitanium
Pentakis(dimethylamido)tantalum
Tetrakis(dimethylamido)tin
Tetrakis(dimethylamido)titanium
Diiodosilane
Trisilylamine
Diisopropylaminosilane
Bis(tert-butylamino)silane
Tris(dimethylamino)silane
Bis(diethylamino)silane