PRODUCT INFO
Explore key information about the chemical elements through this periodic table
Low-k
반도체 DRAM과 3D-NAND
제조 공정에서 사용되며,
CVD/ALD 공정을 통한 SiO2
박막 증착의 용도로 사용됩니다.
High-k
Pentamethylcyclopentadienyl trimethoxytitanium
Tetrakis(dimethylamido)titanium
Tetrakis(dimethylamido)tin
Pentakis(dimethylamido)tantalum
Tris(tert-butylimido)tris(diethylamido)niobium
Bis(cyclopentadienyl)zirconium dichloride
Tetrakis(dimethylamido)zirconium
Tetrakis(ethylmethylamido)zirconium
Bis(cyclopentadienyl)hafnium dichloride
Tetrakis(dimethylamido)hafnium
Tetrakis(ethylmethylamido)hafnium