TDMATi
Precursor > High-k > Titanium
Tetrakis(dimethylamido)titanium
| Chemical Name |
TDMAT [Tetrakis(dimethylamido)titanium] |
| Formula |
Ti(NMe₂)₄ |
| Molecular Weight |
224.15 g/mol |
| Physical State |
Liquid |
| Boiling Point |
160℃ |
| Application |
ALD TiN |
| Capacity |
1,000kg/M |
