Precursor > High-k > Titanium
Pentamethylcyclopentadienyl trimethoxytitanium
| Chemical Name | Cp*Ti(OMe)₃ [Pentamethylcyclopentadienyl trimethoxytitanium] |
|---|---|
| Formula | C₁₃H₂₄O₃Ti |
| Molecular Weight | 276.19 g/mol |
| Physical State | Liquid |
| Boiling Point | 230℃ |
| Application | ALD TiO₂ |
| Capacity | 500kg/M |
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