Precursor > High-k > Niobium
Tris(tert-butylimido)tris(diethylamido)niobium
| Chemical Name | TBTEMNb [Tris(tert-butylimido)tris(diethylamido)niobium] |
|---|---|
| Formula | Nb(NtBu)₃(NEt₂)₃ |
| Molecular Weight | 538.64 g/mol |
| Physical State | Solid |
| Boiling Point | 220℃ |
| Application | ALD NbN |
| Capacity | Under preparation |
