TEMAZr
Precursor > High-k > Zirconium
Tetrakis(ethylmethylamido)zirconium
| Chemical Name |
TEMAZr [Tetrakis(ethylmethylamido)zirconium] |
| Formula |
Zr[N(CH₃)(C₂H₅)]₄ |
| Molecular Weight |
327.58 g/mol |
| Physical State |
Liquid |
| Boiling Point |
210℃ |
| Application |
ALD ZrO₂ |
| Capacity |
1,000kg/M |
