TDMAZr
Precursor > High-k > Zirconium
Tetrakis(dimethylamido)zirconium
| Chemical Name |
TDMAZr [Tetrakis(dimethylamido)zirconium] |
| Formula |
Zr(NMe₂)₄ |
| Molecular Weight |
267.58 g/mol |
| Physical State |
Solid |
| Boiling Point |
150℃ |
| Application |
ALD ZrO₂ |
| Capacity |
1,000kg/M |
