TEMAHf
Precursor > High-k > Hafnium
Tetrakis(ethylmethylamido)hafnium
| Chemical Name |
TEMAHf [Tetrakis(ethylmethylamido)hafnium] |
| Formula |
Hf[N(CH₃)(C₂H₅)]₄ |
| Molecular Weight |
415.69 g/mol |
| Physical State |
Liquid |
| Boiling Point |
220℃ |
| Application |
ALD HfO₂ |
| Capacity |
1,000kg/M |
